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Continue to ChatDeposition and properties of hard wear resistant carbide and carbonitride thin films by physical vapor deposition - https://avesis.itu.edu.tr/yayin/ff134008-94f4-4390-ab39-cd644a6f86c4/deposition-and-properties-of-hard-wear-resistant-carbide-and-carbonitride-thin-films-by-physical-vapor-deposition